Title:
荷電粒子ビーム・システム用の環境セル
Document Type and Number:
Japanese Patent JP5839935
Kind Code:
B2
Abstract:
An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
Inventors:
Revo Novak
Marek Unchovsky
Milos Toss
Martin Chafourek
William Parker
Marcus Straw
Mark Emerson
Marek Unchovsky
Milos Toss
Martin Chafourek
William Parker
Marcus Straw
Mark Emerson
Application Number:
JP2011237151A
Publication Date:
January 06, 2016
Filing Date:
October 28, 2011
Export Citation:
Assignee:
F-I-I Company
International Classes:
H01J37/28; H01J37/18; H01J37/20; H01J37/244
Domestic Patent References:
| JP2010518583A |
Attorney, Agent or Firm:
Masahiko Amagai