Title:
半導体製造ツールを自己学習及び自己改善するための方法及びシステム
Document Type and Number:
Japanese Patent JP5841071
Kind Code:
B2
Abstract:
Performance of a manufacturing tool is optimized. Optimization relies on recipe drifting and generation of knowledge that capture relationships among product output metrics and input material measurement(s) and recipe parameters. Optimized recipe parameters are extracted from a basis of learned functions that predict output metrics for a current state of the manufacturing tool and measurements of input material(s). Drifting and learning are related and lead to dynamic optimization of tool performance, which enables optimized output from the manufacturing tool as the operation conditions of the tool changes. Features of recipe drifting and associated learning can be autonomously or externally configured through suitable user interfaces, which also can be drifted to optimize end-user interaction.
Inventors:
Kosher, Sanjeev
Patel, Skesh Janabhai
Kenji Sugishima
Patel, Skesh Janabhai
Kenji Sugishima
Application Number:
JP2012551343A
Publication Date:
January 06, 2016
Filing Date:
January 28, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/02; G06N3/00; G06N5/04; G06Q50/04
Foreign References:
| US20090240366 | ||||
| US20090271344 |
Attorney, Agent or Firm:
Suzue International Patent Office
Satoshi Kono
Sadao Muramatsu
Shoji Suzue
Kurata Masatoshi
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Nobuhisa Nogawa
Katsu Sunagawa
Satoshi Kono
Sadao Muramatsu
Shoji Suzue
Kurata Masatoshi
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Nobuhisa Nogawa
Katsu Sunagawa