Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
磁性シートの移載システム、キャリア及び磁性シートの移載方法
Document Type and Number:
Japanese Patent JP5841739
Kind Code:
B2
More Like This:
JPH0666377INDUSTRIAL APPLICABILITY: Processing apparatus, processing method, and resist processing apparatus.
JP2023053455INDUSTRIAL ROBOT AND CONTROL METHOD FOR INDUSTRIAL ROBOT
JP2004014751TRAVELING TRACK
Inventors:
Shigemitsu Sato
Tetsuhiro Ohno
Application Number:
JP2011087086A
Publication Date:
January 13, 2016
Filing Date:
April 11, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ULVAC, Inc.
International Classes:
H01L21/677; B65G49/07
Domestic Patent References:
JP2004346398A
JP9324273A
JP2000306975A
JP2005142471A
Foreign References:
US4790258
Attorney, Agent or Firm:
Junichi Omori
Ori Akira



 
Previous Patent: ウェーハの研削方法

Next Patent: MANUFACTURING OF TRANSPARENT MATERIAL HAVING INTERFERENCE COLOR OR OPALESCENT COLOR