Title:
ターゲットアッセンブリ及びスパッタリングターゲット
Document Type and Number:
Japanese Patent JP5841823
Kind Code:
B2
Inventors:
Tokuda Ichiro
Shoichi Nomoto
Shoichi Nomoto
Application Number:
JP2011269246A
Publication Date:
January 13, 2016
Filing Date:
December 08, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/34
Domestic Patent References:
| JP2209476A | ||||
| JP11200028A | ||||
| JP2001240961A | ||||
| JP10287972A | ||||
| JP6220626A | ||||
| JP2009084657A |
Foreign References:
| US5372694 | ||||
| US20050284746 |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira