Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP5844673
Kind Code:
B2
Inventors:
Atsushi Miura
Hiroaki Ishii
Hiroaki Ishii
Application Number:
JP2012078182A
Publication Date:
January 20, 2016
Filing Date:
March 29, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; H01L21/304
Domestic Patent References:
| JP2191571A | ||||
| JP2007220989A | ||||
| JP2011171708A | ||||
| JP2006344907A | ||||
| JP63244845A | ||||
| JP3178123A | ||||
| JP2004214449A | ||||
| JP2012525715A | ||||
| JP11216664A | ||||
| JP64064219A | ||||
| JP2012069696A | ||||
| JP11150176A | ||||
| JP2011211092A |
Foreign References:
| US5635463 | ||||
| WO2012073743A1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda