Title:
樹脂膜のパターニング方法およびそれを用いたセンサの製造方法
Document Type and Number:
Japanese Patent JP5846077
Kind Code:
B2
Inventors:
Koichi Miyashita
Naomi Naomi
Daiki Nakagawa
Aiko Miyata
Kenro Matsui
Naomi Naomi
Daiki Nakagawa
Aiko Miyata
Kenro Matsui
Application Number:
JP2012183194A
Publication Date:
January 20, 2016
Filing Date:
August 22, 2012
Export Citation:
Assignee:
株式会社デンソー
北陸電気工業株式会社
北陸電気工業株式会社
International Classes:
H01L21/3065
Domestic Patent References:
| JP60251628A | ||||
| JP6275569A | ||||
| JP2003156464A | ||||
| JP6118048A |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office
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