Title:
成膜装置
Document Type and Number:
Japanese Patent JP5847054
Kind Code:
B2
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Inventors:
Hirofumi Fujii
Takahiro Yuki
Takahiro Yuki
Application Number:
JP2012226268A
Publication Date:
January 20, 2016
Filing Date:
October 11, 2012
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/32; C23C14/00
Domestic Patent References:
| JP11043767A | ||||
| JP10265946A | ||||
| JP6025846A | ||||
| JP2005029848A |
Attorney, Agent or Firm:
Toshio Yasuda
Mikio Yasuda
Mikio Yasuda