レーザガスの組成比を推定可能な炭酸ガスレーザ発振器

Title:

レーザガスの組成比を推定可能な炭酸ガスレーザ発振器

Document Type and Number:

Japanese Patent JP5850969

Kind Code:

B2

Abstract:

A laser gas estimation device includes a laser oscillator including a ventilator which circulates a laser gas, a discharge tube, a ventilator power unit which supplies power to the ventilator, and a discharge tube power unit which supplies power to the discharge tube, a detection unit which detects gas pressure of the laser gas, ventilator voltage applied to the ventilator, ventilator current supplied to the ventilator, discharge tube voltage applied to the discharge tube, and discharge tube current supplied to the discharge tube, and a composition ratio estimation unit which estimates the composition ratio of the laser gas based on a detected value detected by the detection unit.

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Inventors:

High Tetsuhisa Minoru

Application Number:

JP2014077303A

Publication Date:

February 03, 2016

Filing Date:

April 03, 2014

Export Citation:

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