Title:
低電圧マルチビームＲＦ源
Document Type and Number:
Japanese Patent JP5851997
Kind Code:
B2
Inventors:
Telyaev, Vladimir
Yakovlev, Vyasherslav, Pea
Soljak, Nikolai
Kazakov, Sergey, You
Yakovlev, Vyasherslav, Pea
Soljak, Nikolai
Kazakov, Sergey, You
Application Number:
JP2012535379A
Publication Date:
February 03, 2016
Filing Date:
October 21, 2010
Export Citation:
Assignee:
OMEGA-P,INC.
International Classes:
H01J23/06; H01J23/027; H01J23/20
Domestic Patent References:
| JP2007524186A | ||||
| JP2008146925A | ||||
| JP62229735A | ||||
| JP2007123184A |
Attorney, Agent or Firm:
Creation International Patent Office