Title:
蒸着に対する反応部位の不活性化
Document Type and Number:
Japanese Patent JP5856085
Kind Code:
B2
Abstract:
Methods and structures relating to the formation of mixed SAMs for preventing undesirable growth or nucleation on exposed surfaces inside a reactor are described. A mixed SAM can be formed on surfaces for which nucleation is not desired by introducing a first SAM precursor having molecules of a first length and a second SAM precursor having molecules of a second length shorter than the first. Examples of exposed surfaces for which a mixed SAM can be provided over include reactor surfaces and select surfaces of integrated circuit structures, such as insulator and dielectric layers.
Inventors:
Cello Eric
Vergies Mohethe
Muscat Anthony
Mirror sean
Vergies Mohethe
Muscat Anthony
Mirror sean
Application Number:
JP2012553957A
Publication Date:
February 09, 2016
Filing Date:
February 14, 2011
Export Citation:
Assignee:
ASM America Inc.
International Classes:
H01L21/316; C23C16/44; H01L21/31; H01L21/312
Domestic Patent References:
| JP2006515038A | ||||
| JP2007270278A | ||||
| JP2009256796A | ||||
| JP2007505220A | ||||
| JP2008177283A | ||||
| JP2007501902A |
Foreign References:
| US20080242097 |
Attorney, Agent or Firm:
Takashi Onodera
Fumihiko Yagisawa
Fumihiko Yagisawa