Title:
液晶基板保持盤の製造方法
Document Type and Number:
Japanese Patent JP5858631
Kind Code:
B2
Inventors:
Kato Masahide
Application Number:
JP2011069399A
Publication Date:
February 10, 2016
Filing Date:
March 28, 2011
Export Citation:
Assignee:
Techno Quartz Co., Ltd.
International Classes:
G03F7/20; G02F1/13; H01L21/683
Domestic Patent References:
| JP2004087642A | ||||
| JP2004349557A | ||||
| JP2005191500A | ||||
| JP2004241668A | ||||
| JP2006032461A |
Attorney, Agent or Firm:
Takeshi Chiaki