Title:
薄膜製造装置、薄膜製造方法、液滴吐出ヘッドの製造方法
Document Type and Number:
Japanese Patent JP5862286
Kind Code:
B2
Inventors:
Osamu Machida
Yagi Masahiro
Ryo Tashiro
Peter Abels
Melanie Mike Snner
Stephan man
Jochen Stolenberg
Yagi Masahiro
Ryo Tashiro
Peter Abels
Melanie Mike Snner
Stephan man
Jochen Stolenberg
Application Number:
JP2011286156A
Publication Date:
February 16, 2016
Filing Date:
December 27, 2011
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L21/31; B41J2/16; G01B11/06; H01L21/316
Domestic Patent References:
| JP2008028381A | ||||
| JP2011054716A | ||||
| JP9221366A | ||||
| JP2007061780A | ||||
| JP2011009726A |
Foreign References:
| US20080044673 |
Attorney, Agent or Firm:
Tadahiko Ito
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