Title:
成膜装置及び成膜方法
Document Type and Number:
Japanese Patent JP5869502
Kind Code:
B2
Inventors:
Yoshiharu Nakajima
Naomasa Miyatake
Yasunari Mori
Hattori Nozomu
Kazuki Takizawa
Naomasa Miyatake
Yasunari Mori
Hattori Nozomu
Kazuki Takizawa
Application Number:
JP2013021402A
Publication Date:
February 24, 2016
Filing Date:
February 06, 2013
Export Citation:
Assignee:
Mitsui Shipbuilding Co., Ltd.
International Classes:
C23C16/513; H01L21/205; H05H1/24
Domestic Patent References:
| JP2013038148A | ||||
| JP2005123159A | ||||
| JP2004227990A | ||||
| JP2007095536A | ||||
| JP2008293925A | ||||
| JP2011511615A | ||||
| JP2008274385A |
Foreign References:
| WO2013031800A1 |
Attorney, Agent or Firm:
Global IP Tokyo Patent Business Corporation