感光性樹脂組成物、これを用いたフォトレジストフィルム、レジストパターンの形成方法及び導体パターンの形成方法

Title:

感光性樹脂組成物、これを用いたフォトレジストフィルム、レジストパターンの形成方法及び導体パターンの形成方法

Document Type and Number:

Japanese Patent JP5878040

Kind Code:

B2

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Inventors:

Daiki Toyota

Application Number:

JP2012042872A

Publication Date:

March 08, 2016

Filing Date:

February 29, 2012

Export Citation:

Assignee:

Nikko Materials Co., Ltd.

International Classes:

G03F7/027; G03F7/004; H05K3/06; H05K3/18

Domestic Patent References:

Attorney, Agent or Firm:

Yoneda Keikei

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