蒸着用材料、ガスバリア性蒸着フィルム及びガスバリア性蒸着フィルムの製造方法

Title:

蒸着用材料、ガスバリア性蒸着フィルム及びガスバリア性蒸着フィルムの製造方法

Document Type and Number:

Japanese Patent JP5879789

Kind Code:

B2

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Inventors:

Hoegata Yusuke
Toshiaki Yoshihara
Junpei Hayashi

Application Number:

JP2011158053A

Publication Date:

March 08, 2016

Filing Date:

July 19, 2011

Export Citation:

Assignee:

Toppan Printing Co., Ltd.

International Classes:

C23C14/24

Domestic Patent References:

Attorney, Agent or Firm:

Ichi Hirose
Toru Miyasaka

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