Title:
静電チャック
Document Type and Number:
Japanese Patent JP5891332
Kind Code:
B2
Inventors:
Akihiro Kuribayashi
Application Number:
JP2015172910A
Publication Date:
March 22, 2016
Filing Date:
September 02, 2015
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP4749072B2 | ||||
| JP2008166508A | ||||
| JP2009152475A | ||||
| JP2010114396A | ||||
| JP4349952B2 | ||||
| JP4666903B2 | ||||
| JP4256503B2 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda