Title:
チャックテーブルを用いたウエーハのレーザー加工方法
Document Type and Number:
Japanese Patent JP5893952
Kind Code:
B2
Inventors:
Kuki Junichi
Satoshi Kumazawa
Satoshi Kumazawa
Application Number:
JP2012036769A
Publication Date:
March 23, 2016
Filing Date:
February 22, 2012
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23K26/02; B23K26/10
Domestic Patent References:
| JP6236918A | ||||
| JP2010186863A | ||||
| JP2003150523A |
Attorney, Agent or Firm:
Hiroaki Sakai