Title:
研磨物品、その製造方法及びその使用方法
Document Type and Number:
Japanese Patent JP5896925
Kind Code:
B2
Abstract:
Abrasive articles containing solid abrasive particles (A) selected from the group consisting of inorganic particles, organic particles and inorganic-organic hybrid particles (a1) having an average primary particle size of from 1 to 500 nm as determined by laser light diffraction and having electron donor groups (a2) chemically bonded to their surface are provided. The said solid abrasive particles (A) are distributed throughout or on top of or throughout and on top of a solid matrix (B). A method for manufacturing abrasive articles and a method for processing substrates useful for fabricating electrical and optical devices are provided. The said methods make use of the said abrasive articles.
Inventors:
Christoph Kuyat
Yujuo Lee
Kenneth lashing
Yujuo Lee
Kenneth lashing
Application Number:
JP2012554448A
Publication Date:
March 30, 2016
Filing Date:
January 19, 2011
Export Citation:
Assignee:
BASF SE
International Classes:
C09K3/14; B24B37/11; B24B37/24; B24B37/26; H01L21/304
Domestic Patent References:
| JP2000503601A | ||||
| JP2003520283A | ||||
| JP2007514553A | ||||
| JP2005093785A |
Foreign References:
| WO2009128982A2 | ||||
| WO2008079743A1 |
Other References:
化学大辞典6,共立出版株式会社,1987年,縮刷版第30刷,第264~265頁
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Isoyama Asami
Takuya Kuno
Isoyama Asami