結像誤差の決定を行う光学結像装置

Title:

結像誤差の決定を行う光学結像装置

Document Type and Number:

Japanese Patent JP5897540

Kind Code:

B2

Abstract:

An optical imaging device, including an imaging unit and a measuring device. The imaging unit includes a first optical element group having at least one first optical element, which contributes to the imaging. The measuring device determines an imaging error, which occurs during the imaging, using a capturing signal. The measuring device includes a measurement light source, a second optical element group and a capturing unit. The measurement light source emits at least one measurement light bundle, The second optical element group includes an optical reference element and a second optical element, which guide the measurement light bundle onto the capturing unit, to generate the capturing signal. Each second optical element has a defined spatial relationship with a respective one of the first optical elements, The second optical elements differ from the first optical elements. The measuring device determines the imaging error with the capturing signal.

More Like This:

JP2004184824	MICRO DEVICE AND METHOD OF MANUFACTURING THE SAME
JP3408816	INDUSTRIAL APPLICABILITY: Variable spot size scanning device
JP2006080539	IMPROVED PATTERN GENERATOR

Inventors:

Rolf Flyman
Ulrich Wekman

Application Number:

JP2013273031A

Publication Date:

March 30, 2016

Filing Date:

December 27, 2013

Export Citation:

Click for automatic bibliography generation Help