Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6076101
Kind Code:
B2
Inventors:
Akihiko Taki
Application Number:
JP2013008177A
Publication Date:
February 08, 2017
Filing Date:
January 21, 2013
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2008034490A |
Attorney, Agent or Firm:
Takashi Otsubo
Sachiko Muraguchi
Sachiko Muraguchi