Title:
基板処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP6290338
Kind Code:
B2
Inventors:
Norihiro Ito
Nakamori Mitsunori
Kono
Yousuke Yatani
Jun Nonaka
Nakamori Mitsunori
Kono
Yousuke Yatani
Jun Nonaka
Application Number:
JP2016171118A
Publication Date:
March 07, 2018
Filing Date:
September 01, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; G03F7/42; H01L21/304
Domestic Patent References:
| JP2001102346A | ||||
| JP2008258437A | ||||
| JP2010225789A | ||||
| JP2011228438A | ||||
| JP2008246319A | ||||
| JP2011514684A | ||||
| JP5715981B2 | ||||
| JP6002262B2 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Hideyuki Mori
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Hideyuki Mori