Title:
ナノインプリント用テンプレートの製造方法
Document Type and Number:
Japanese Patent JP6311772
Kind Code:
B2
Inventors:
Yoichi Hitomi
Samurai samurai
Masaaki Kurihara
Samurai samurai
Masaaki Kurihara
Application Number:
JP2016214702A
Publication Date:
April 18, 2018
Filing Date:
November 01, 2016
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| JP2010239009A | ||||
| JP2010284921A | ||||
| JP2009016814A | ||||
| JP2010085977A |
Foreign References:
| US20040029052 |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi