Title:
基板固定装置
Document Type and Number:
Japanese Patent JP6377975
Kind Code:
B2
Abstract:
A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.
Inventors:
Akiju Tamagawa
Norio Shiraiwa
Yoshikawa Tadayoshi
Naoto Watanabe
Miki Saito
Norio Shiraiwa
Yoshikawa Tadayoshi
Naoto Watanabe
Miki Saito
Application Number:
JP2014128275A
Publication Date:
August 22, 2018
Filing Date:
June 23, 2014
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP5259048A | ||||
| JP3003250A | ||||
| JP2012074650A | ||||
| JP2010098012A | ||||
| JP2013201432A | ||||
| JP2006056731A | ||||
| JP2014060242A | ||||
| JP2012099781A | ||||
| JP2013045989A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito