Title:
半導体装置レシピ管理システム
Document Type and Number:
Japanese Patent JP6395793
Kind Code:
B2
Abstract:
Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
Inventors:
David Dominique Gerard
Lee Chris W
Lee Chris W
Application Number:
JP2016237816A
Publication Date:
September 26, 2018
Filing Date:
December 07, 2016
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G06F9/50; H01L21/66
Domestic Patent References:
| JP200399113A | ||||
| JP11340111A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office
Previous Patent: 白熱ランプ劣化診断装置およびそれを備えた検査機器およびシステム
Next Patent: BAND COMPRESSING ENCODER FOR STILL PICTURE
Next Patent: BAND COMPRESSING ENCODER FOR STILL PICTURE