Title:
機能素子、機能素子の製造方法、電子機器、および移動体
Document Type and Number:
Japanese Patent JP6398348
Kind Code:
B2
Inventors:
Makoto Furuhata
Application Number:
JP2014121216A
Publication Date:
October 03, 2018
Filing Date:
June 12, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5747; B81B3/00; B81C3/00; H01L29/84
Domestic Patent References:
| JP2013234904A | ||||
| JP2010107521A |
Foreign References:
| US20030110858 | ||||
| US6752017 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai