Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6400967
Kind Code:
B2
Inventors:
Tetsuo Ito
Application Number:
JP2014147606A
Publication Date:
October 03, 2018
Filing Date:
July 18, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2004111903A | ||||
| JP2005019456A | ||||
| JP2010012591A | ||||
| JP2008135750A | ||||
| JP2013016821A |
Foreign References:
| US20100219920 | ||||
| US20040159343 |
Attorney, Agent or Firm:
Takashi Otsubo
Sachiko Muraguchi
Sachiko Muraguchi