Title:
表面撮像装置、表面検査装置、及び表面撮像方法
Document Type and Number:
Japanese Patent JP6402082
Kind Code:
B2
Inventors:
Chie Toyoda
Toshihiko Tsukada
Shujiro Kuribayashi
Nakamura Tomo
Go Nakayama
Toshihiko Tsukada
Shujiro Kuribayashi
Nakamura Tomo
Go Nakayama
Application Number:
JP2015178738A
Publication Date:
October 10, 2018
Filing Date:
September 10, 2015
Export Citation:
Assignee:
Toyota Central R & D Labs.
TOYOTA JIDOSHA KABUSHIKI KAISHA
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
G01N21/88; F01L3/24
Domestic Patent References:
| JP2011133288A | ||||
| JP5203584A | ||||
| JP3226660A | ||||
| JP2006337074A | ||||
| JP11295234A | ||||
| JP9243574A | ||||
| JP3225264A |
Foreign References:
| US8953155 |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori