Title:
圧電素子利用装置の製造方法
Document Type and Number:
Japanese Patent JP6410027
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezo electric element using device capable of preventing a piezoelectric film from being reduced with hydrogen when a passivation film is formed.SOLUTION: A surface of a piezoelectric element 9 is covered with a first hydrogen barrier film 14 except a part thereof. An insulation film 15 is laminated on the first hydrogen barrier film 14. A contact hole 33 is formed in the first hydrogen barrier film 14 and insulation film 15. An upper interconnect 17 is formed on the insulation film 15. One end part of the upper interconnect 17 is connected to an upper electrode 13 of the piezoelectric element 9 through the contact hole 33, and the other end part of the upper interconnect 17 is led out of the piezoelectric element 9. On the insulation film 15, a second hydrogen barrier film 20 covering the upper interconnect 17 is formed. On the second hydrogen barrier film 20, a passivation film 21 covering the second hydrogen barrier film 20 is formed.SELECTED DRAWING: Figure 2B
Inventors:
Iida Castle
Tomohiro Date
Tomohiro Date
Application Number:
JP2014180487A
Publication Date:
October 24, 2018
Filing Date:
September 04, 2014
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L41/053; B41J2/14; B41J2/16; H01L41/09; H01L41/23
Domestic Patent References:
| JP2013119182A | ||||
| JP2002100742A | ||||
| JP2010118641A | ||||
| JP2001260357A | ||||
| JP2013080786A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Hideyuki Kayama
Kyoumura Junji
Mio Kawasaki
Hideyuki Kayama
Kyoumura Junji