Title:
基板収納容器
Document Type and Number:
Japanese Patent JP6410151
Kind Code:
B2
Inventors:
Koji Shinji
Hiroyuki Shida
Hiroyuki Shida
Application Number:
JP2015107261A
Publication Date:
October 24, 2018
Filing Date:
May 27, 2015
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673; B65G49/00
Domestic Patent References:
| JP2009302414A | ||||
| JP2009231653A | ||||
| JP2006100712A | ||||
| JP2007270576A |
Attorney, Agent or Firm:
Tomohiro Sakamoto
Ayumi Yada
Toshihiro Oishi
Ayumi Yada
Toshihiro Oishi