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Patent Searching and Data


Title:
IGZOの製造方法
Document Type and Number:
Japanese Patent JP6415363
Kind Code:
B2
Inventors:
Satomi Seri
Application Number:
JP2015051882A
Publication Date:
October 31, 2018
Filing Date:
March 16, 2015
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Assignee:
Muroran Institute of Technology
International Classes:
C01G15/00
Domestic Patent References:
JP2015129079A
JP2015151358A
JP2014005165A
JP2002042583A
JP2012094841A
Foreign References:
US20140091302
US20120205597
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Hideaki Ito