Title:
IGZOの製造方法
Document Type and Number:
Japanese Patent JP6415363
Kind Code:
B2
Inventors:
Satomi Seri
Application Number:
JP2015051882A
Publication Date:
October 31, 2018
Filing Date:
March 16, 2015
Export Citation:
Assignee:
Muroran Institute of Technology
International Classes:
C01G15/00
Domestic Patent References:
JP2015129079A | ||||
JP2015151358A | ||||
JP2014005165A | ||||
JP2002042583A | ||||
JP2012094841A |
Foreign References:
US20140091302 | ||||
US20120205597 |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Hideaki Ito
Haruko Sanwa
Hideaki Ito