Title:
薄膜トランジスタおよびその製造方法、薄膜トランジスタ基板、液晶表示装置
Document Type and Number:
Japanese Patent JP6429816
Kind Code:
B2
Inventors:
Tsutomu Matsuura
Yamagata Aritomo
Yamagata Aritomo
Application Number:
JP2016028121A
Publication Date:
November 28, 2018
Filing Date:
February 17, 2016
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L29/786; G02F1/1368
Domestic Patent References:
| JP2014157893A | ||||
| JP2015005767A | ||||
| JP2013175713A | ||||
| JP2012248853A | ||||
| JP2014131022A | ||||
| JP2014143414A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita