Title:
角速度センサ
Document Type and Number:
Japanese Patent JP6435631
Kind Code:
B2
Abstract:
An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode.
Inventors:
Sakai Mineichi
Naoki Yoshida
Keisugi Sugimoto
Naoki Yoshida
Keisugi Sugimoto
Application Number:
JP2014089319A
Publication Date:
December 12, 2018
Filing Date:
April 23, 2014
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01C19/5614; H01L41/04; H01L41/047; H01L41/113
Domestic Patent References:
| JP2014002110A | ||||
| JP2009294127A | ||||
| JP2000121365A | ||||
| JP2013005072A | ||||
| JP2006010659A | ||||
| JP2005292117A |
Foreign References:
| US20120272711 |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office