平面移動装置 - Asahi Kasei Engineering Co., Ltd.

Title:

平面移動装置

Document Type and Number:

Japanese Patent JP6437884

Kind Code:

B2

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Inventors:

Kiguchiya Hidenari
Eiji Sato
Takumi Hara

Application Number:

JP2015113446A

Publication Date:

December 12, 2018

Filing Date:

June 03, 2015

Export Citation:

Assignee:

Asahi Kasei Engineering Co., Ltd.

International Classes:

G03F9/00; H01L21/68

Domestic Patent References:

Foreign References:

WO2008129762A1
WO2014013733A1

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito

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