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Title:
像検査装置、および、像検査方法
Document Type and Number:
Japanese Patent JP6459405
Kind Code:
B2
Inventors:
Tokuaki Higuchi
Tomoyuki Marugame
Kota Aono
Application Number:
JP2014224290A
Publication Date:
January 30, 2019
Filing Date:
November 04, 2014
Export Citation:
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Assignee:
Toppan Printing Co., Ltd.
International Classes:
G01N21/892; G03H1/04; G03H1/22; G07D7/12
Domestic Patent References:
JP2003256786A
JP2014066663A
JP2000259770A
JP2003504694A
Foreign References:
WO2015185935A1
US20050129281
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda



 
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