Title:
基板コーティングのためのガスクッション装置および技法
Document Type and Number:
Japanese Patent JP6461195
Kind Code:
B2
Abstract:
A coating can be provided on a substrate. Fabrication of the coating can include forming a solid layer in a specified region of the substrate while supporting the substrate in a coating system using a gas cushion. For example, a liquid coating can be printed over the specified region while the substrate is supported by the gas cushion. The substrate can be held for a specified duration after the printing the patterned liquid. The substrate can be conveyed to a treatment zone while supported using the gas cushion. The liquid coating can be treated to provide the solid layer including continuing to support the substrate using the gas cushion.
Inventors:
Kor, Alexander Saw-Kang
Mac, justin
Bronsky, Elijah
Madigan, Conner F.
Rabinovitch, Eugene
Halsey, Nahid
Buchner, Christopher
Lewis, Gregory
Mac, justin
Bronsky, Elijah
Madigan, Conner F.
Rabinovitch, Eugene
Halsey, Nahid
Buchner, Christopher
Lewis, Gregory
Application Number:
JP2016563454A
Publication Date:
January 30, 2019
Filing Date:
April 27, 2015
Export Citation:
Assignee:
Cativa, Incorporated
International Classes:
B05D3/00; B05C9/12; B05C9/14; B05C13/02; H01L51/50; H05B33/04; H05B33/10
Domestic Patent References:
| JP2006511916A | ||||
| JP2015510254A | ||||
| JP2015532222A | ||||
| JP2002246183A | ||||
| JP2006024896A |
Foreign References:
| WO2013096503A1 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto
Natsuki Morishita
Takatoshi Iida
Daisuke Ishikawa
Kensaku Yamamoto