Title:
荷電粒子装置
Document Type and Number:
Japanese Patent JP6464064
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle device that can acquire a transmission image and a diffraction pattern without changing the condition of an image forming optical system.SOLUTION: A charged particle device 100 includes a charged particle source 102 for generating charged particles, an irradiation optical system 104 for irradiating a sample with charged particles, an objective lens 108 for forming a transmission image with charged particles transmitted through the sample, a deflection unit 110 which is arranged at the rear stage of the objective lens 108 and deflects the charged particles transmitted through the sample, a diaphragm 112 arranged at the rear stage of the deflection unit 110, an image forming optical system 114 for forming a transmission image focused by the objective lens 108 on a detection surface 115, a detector 116 for detecting the charged particles incident onto the detection surface 115, and a controller 130 for controlling the deflection unit 110. The controller 130 controls the deflection unit 110 so that the charged particles scattered at different scattering angles in the sample sequentially pass through a diaphragm 112.SELECTED DRAWING: Figure 3
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Inventors:
Kazuya Yamazaki
Application Number:
JP2015175938A
Publication Date:
February 06, 2019
Filing Date:
September 07, 2015
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/295; H01J37/09; H01J37/147; H01J37/22; H01J37/244; H01J37/26
Domestic Patent References:
| JP56013650A | ||||
| JP1267945A | ||||
| JP59119661A | ||||
| JP2015032384A | ||||
| JP2006228748A |
Foreign References:
| US20150034822 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi