Title:
保持部材及び静電チャック並びに半導体製造用装置
Document Type and Number:
Japanese Patent JP6475219
Kind Code:
B2
More Like This:
Inventors:
Atsushi Suzuki
Application Number:
JP2016226036A
Publication Date:
February 27, 2019
Filing Date:
November 21, 2016
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H01L21/3065; H02N13/00
Domestic Patent References:
| JP2016189425A | ||||
| JP2005033181A | ||||
| JP10163303A | ||||
| JP2013185054A | ||||
| JP6215927A | ||||
| JP2014009354A | ||||
| JP2015088745A |
Foreign References:
| US20150004400 |
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation
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