Title:
マスクステージ及びステージ装置
Document Type and Number:
Japanese Patent JP6482061
Kind Code:
B2
Inventors:
Haruhiko Kususe
Tomohiro Suzuki
Tomohiro Suzuki
Application Number:
JP2014238293A
Publication Date:
March 13, 2019
Filing Date:
November 25, 2014
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
G03F7/20; G01B11/00; G03F9/00
Domestic Patent References:
| JP11307436A | ||||
| JP2007129218A | ||||
| JP2004111685A | ||||
| JP2005184034A |
Attorney, Agent or Firm:
Kenjiro Oyama
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