Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP6483348
Kind Code:
B2
Inventors:
Makoto Ano
Application Number:
JP2014069392A
Publication Date:
March 13, 2019
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/308
Domestic Patent References:
| JP2013077625A | ||||
| JP2008153322A | ||||
| JP10149893A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita