Title:
露光装置および基板処理装置
Document Type and Number:
Japanese Patent JP6495707
Kind Code:
B2
Inventors:
Satoshi Miyagi
Koji Nishi
Toru Kadoma
Koji Nishi
Toru Kadoma
Application Number:
JP2015062746A
Publication Date:
April 03, 2019
Filing Date:
March 25, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G03F7/20; B05C9/12; G03F7/30; H01L21/027; H01L21/677
Domestic Patent References:
| JP2015032755A | ||||
| JP2001250767A | ||||
| JP2009181969A | ||||
| JP2003207902A | ||||
| JP2010175964A | ||||
| JP2013232621A | ||||
| JP2002198413A |
Foreign References:
| US20070037292 |
Attorney, Agent or Firm:
Yoshito Fukushima
Sawamura Hideyuki
Sawamura Hideyuki