Title:
位置測定システム、干渉計、及びリソグラフィ装置
Document Type and Number:
Japanese Patent JP6496077
Kind Code:
B2
Inventors:
Van der Pasche, Engelvertas, Antonius, Franciscus
Van, Leewen, Robert, Edgar
Van, Leewen, Robert, Edgar
Application Number:
JP2018502106A
Publication Date:
April 03, 2019
Filing Date:
July 29, 2016
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G01B11/00; G01B11/245; G01B11/26; G03F7/20
Domestic Patent References:
| JP9210648A | ||||
| JP2012073250A | ||||
| JP2010091587A |
Foreign References:
| US20030186136 | ||||
| DE69024833C2 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito