Title:
単結晶基板の製造方法およびレーザ素子の製造方法
Document Type and Number:
Japanese Patent JP6514915
Kind Code:
B2
Inventors:
Takashi Matsuoka
Taka Hanada
Tsuguo Fukuda
Akira Minato
Taka Hanada
Tsuguo Fukuda
Akira Minato
Application Number:
JP2015039155A
Publication Date:
May 15, 2019
Filing Date:
February 27, 2015
Export Citation:
Assignee:
Tohoku University
Fukuda Crystal Technology Laboratory Co., Ltd.
Fukuda Crystal Technology Laboratory Co., Ltd.
International Classes:
C30B29/38; C23C16/01; C23C16/34; C30B25/18; H01L21/205
Domestic Patent References:
| JP8288220A | ||||
| JP2005187317A | ||||
| JP2009099959A | ||||
| JP2000323797A |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa