Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6517564
Kind Code:
B2
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Inventors:
Takashi Ota
Application Number:
JP2015069650A
Publication Date:
May 22, 2019
Filing Date:
March 30, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/306
Domestic Patent References:
| JP2011211092A | ||||
| JP2004078348A | ||||
| JP2010242684A | ||||
| JP11121426A |
Foreign References:
| US20020144713 |
Attorney, Agent or Firm:
Hiroyuki Maei