Ａｇ合金膜及びＡｇ合金膜の製造方法 - Mitsubishi Materials Corporation

Title:

Ａｇ合金膜及びＡｇ合金膜の製造方法

Document Type and Number:

Japanese Patent JP6520289

Kind Code:

B2

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Inventors:

Fumitake Kikuchi
Rie Mori
Hiromi Nakazawa

Application Number:

JP2015064173A

Publication Date:

May 29, 2019

Filing Date:

March 26, 2015

Export Citation:

Assignee:

Mitsubishi Materials Corporation

International Classes:

H01B5/14; C22C5/06; C23C14/14; C23C14/34; H01B13/00

Domestic Patent References:

JP2014157821A
JP2004217986A

Attorney, Agent or Firm:

Yasushi Matsunuma
Mitsuo Teramoto
Fumihiro Hosokawa
Kazunori Onami
Masatake Shiga

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