Title:
光学コンポーネント
Document Type and Number:
Japanese Patent JP6530603
Kind Code:
B2
Abstract:
An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.
Inventors:
Zeverin Valdis
Matthias Aus
Roger Mark Bostock
Jen Darung
Sebastian Lani
Benedict Nauf
Christian kempter
Matthias Aus
Roger Mark Bostock
Jen Darung
Sebastian Lani
Benedict Nauf
Christian kempter
Application Number:
JP2014557030A
Publication Date:
June 12, 2019
Filing Date:
February 14, 2013
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B7/198
Domestic Patent References:
| JP2011180528A | ||||
| JP2009075557A | ||||
| JP2005099682A | ||||
| JP2010518595A | ||||
| JP2009111369A | ||||
| JP2010093253A | ||||
| JP2015515117A |
Foreign References:
| WO2010049076A2 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Yamato Okano
Groundwork Kenichi
Yamato Okano