Title:
電磁石制御装置および電磁石システム
Document Type and Number:
Japanese Patent JP6530693
Kind Code:
B2
Inventors:
Misako Kudo
Kazuki Sato
Toshimitsu Ibarata
Tomonori Ohashi
Kazuki Sato
Toshimitsu Ibarata
Tomonori Ohashi
Application Number:
JP2015210872A
Publication Date:
June 12, 2019
Filing Date:
October 27, 2015
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H05H1/46; H01F7/20; H01L21/3065; H03K17/695
Domestic Patent References:
| JP2007132902A | ||||
| JP2012149618A | ||||
| JP2195294A | ||||
| JP7072277A | ||||
| JP54090492A | ||||
| JP60098822A | ||||
| JP2014158005A | ||||
| JP2001165343A | ||||
| JP2002164229A | ||||
| JP2012074972A | ||||
| JP2013102098A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Mitsuru Ueda
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Mitsuru Ueda