Title:
ビーム強度変換膜、及びビーム強度変換膜の製造方法
Document Type and Number:
Japanese Patent JP6534775
Kind Code:
B2
Abstract:
Provided is a beam intensity converting film that has sufficient shielding property, sufficient durability, and sufficient heat resistance and that can reduce the extent of radioactivation. An attenuator (1) is constituted by a graphite film placed such that a surface thereof intersects the beam axis of a charged particle beam (X), the graphite film has a thickness of 1 µm or greater, and the thermal conductivity in a surface direction of the graphite film is equal to or greater than 20 times the thermal conductivity in the thickness direction of the graphite film.
Inventors:
Mutsuaki Murakami
Atsumi Tatami
Tachibana Masamitsu
Atsumi Tatami
Tachibana Masamitsu
Application Number:
JP2018514547A
Publication Date:
June 26, 2019
Filing Date:
April 20, 2017
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
G21K3/00
Domestic Patent References:
| JP2013238515A | ||||
| JP2012249940A | ||||
| JP2011063509A |
Foreign References:
| WO2015045641A1 |
Attorney, Agent or Firm:
Harakenzo world patent & trademark