Title:
レーザ装置及び極端紫外光生成システム
Document Type and Number:
Japanese Patent JP6539722
Kind Code:
B2
Abstract:
A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.
Inventors:
Yoshiaki Kurosawa
Hoshino Hideyuki
Hoshino Hideyuki
Application Number:
JP2017504320A
Publication Date:
July 03, 2019
Filing Date:
March 06, 2015
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H01S3/23; G03F7/20; H01S3/00; H05G2/00
Domestic Patent References:
| JP2013207298A | ||||
| JP2008283107A | ||||
| JP2013218286A |
Attorney, Agent or Firm:
Fujio Patent Office