Title:
炭化珪素膜の成膜装置のクリーニング方法
Document Type and Number:
Japanese Patent JP6541257
Kind Code:
B2
Inventors:
Hideyuki Kurihara
Yosuke Tanimoto
Yosuke Tanimoto
Application Number:
JP2015125079A
Publication Date:
July 10, 2019
Filing Date:
June 22, 2015
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
H01L21/205; C23C16/44; C23C16/448
Domestic Patent References:
| JP2012080035A | ||||
| JP2015037134A | ||||
| JP2012182373A | ||||
| JP2009277757A | ||||
| JP2003124126A | ||||
| JP2011523214A | ||||
| JP2001250785A |
Attorney, Agent or Firm:
Shu Oikawa
Norihiko Ara
Tomoo Katsumata
Masatake Shiga
Suzuki Mitsuyoshi
Osamu Mikuni
Norihiko Ara
Tomoo Katsumata
Masatake Shiga
Suzuki Mitsuyoshi
Osamu Mikuni