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Title:
ヘテロ接合電界効果型トランジスタおよびその製造方法
Document Type and Number:
Japanese Patent JP6541879
Kind Code:
B2
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Inventors:
Imai Akifumi
Takuma Nanjo
Muneyoshi Suita
Takashi Matsuda
Kenichiro Kurahashi
Eiji Yagyu
Application Number:
JP2018523541A
Publication Date:
July 10, 2019
Filing Date:
April 17, 2017
Export Citation:
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Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/338; H01L21/205; H01L29/778; H01L29/812
Domestic Patent References:
JP201472430A
JP2013149732A
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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